Glasses Tech

September 22, 2009

OH-Related Capacitance-Voltage Recovery Effect in MOS Capacitors Passivated by Fluoride-Containing ZnO-B2O3-SiO2-P2O5 Glasses

Filed under: Glasses 1995 — admin @ 3:10 am


The purpose of this work is to clarify the relationship between some of the properties of MOS capacitors passivated by fluoride-containing zinc borosilicate glasses and the hydroxyl content of the glasses. Substitution of ZnF2 for ZnO progressively decreases the OH^- absorption coefficient and the C-V curve shift, △(↑-)VGVG” height=”17″ width=”29″> , in the MOS capacitors decreased. A good recovery without hysteresis was observed in the MOS capacitors passivated by glasses with a small concentration of OH^-ions.

Keiji Kobayashi
Toshiba ULSI Research and Development Center, 1-Komukai Toshiba-cho Kawasaki, Japan

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